I realize we are not done with it yet. There are new process node launches planned for the next few years and each processor generation continues to improve density, power consumption and price per transistor.
I’ll hold off declaring it dead till it is well and truly dead. And even then we could expect cost improvements as the great wheel of investment into the next node would no longer need to turn and the last node would become a final standard.
As to physical limits, there are plenty of weird quantum particle effects to explore so that seems overstated. We are still just flipping on and off electromagnetic charge. Haven’t even gotten to the quarks yet!
You can draw a straight line right through this log scale plot that goes to 2020. Not sure what definition of Moores Law you are using, but it doesn’t seem to match the one on Wikipedia.